Ordered Arrays of SiGe Islands from Low-Energy PECVD
نویسندگان
چکیده
منابع مشابه
Ordered Arrays of SiGe Islands from Low-Energy PECVD
SiGe islands have been proposed for applications in the fields of microelectronics, optoelectronics and thermoelectrics. Although most of the works in literature are based on MBE, one of the possible advantages of low-energy plasma-enhanced chemical vapor deposition (LEPECVD) is a wider range of deposition rates, which in turn results in the possibility of growing islands with a high Ge concent...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2010
ISSN: 1931-7573,1556-276X
DOI: 10.1007/s11671-010-9773-0